Hav nyob ntawd! Raws li ib tug neeg muag khoom ntawm PECVD Graphite Boats, kuv feem ntau tau nug txog txhua yam kev paub meej. Ib lo lus nug uas tshwm sim me ntsis yog: "Dab tsi yog qhov sib nqus susceptibility ntawm PECVD graphite nkoj?" Cia peb khawb rau hauv lub ncauj lus no thiab rhuav tshem nws hauv txoj kev uas yooj yim to taub.
Ua ntej tshaj, cia peb tham me ntsis txog qhov PECVD yog dab tsi. Plasma - Txhim kho Chemical Vapor Deposition (PECVD) yog cov txheej txheem siv nyob rau hauv semiconductor thiab photovoltaic industries. Nws yog ib txoj hauv kev los tso cov yeeb yaj kiab nyias ntawm lub substrate. Thiab lub nkoj graphite hauv PECVD yog ib qho tseem ceeb heev. Nws tuav cov wafers thaum lub sij hawm deposition txheej txheem, kom ntseeg tau tias lawv nyob rau hauv txoj hauj lwm zoo thiab yuav tsum uniformly coated. Koj tuaj yeem tshawb xyuas ntau ntxiv txog PECVD Graphite Boat ntawm peb lub vev xaib.
Tam sim no, magnetic susceptibility. Nws yog ib qho kev ntsuas ntawm ntau npaum li cas cov khoom yuav ua magnetized nyob rau hauv ib daim ntawv thov magnetic teb. Hauv cov ntsiab lus yooj yim, nws qhia peb li cas teb cov khoom siv rau lub zog sib nqus. Cov khoom sib txawv muaj qhov sib txawv sib nqus, thiab cov txiaj ntsig no tuaj yeem yog qhov zoo lossis tsis zoo.
Graphite, uas yog cov khoom tseem ceeb ntawm peb PECVD graphite nkoj, yog cov khoom siv diamagnetic. Cov ntaub ntawv diamagnetic muaj qhov tsis zoo magnetic susceptibility. Qhov no txhais tau hais tias thaum koj muab lawv tso rau hauv ib qho chaw sib nqus, lawv tsim ib qho chaw sib nqus nyob rau hauv qhov kev coj mus rau qhov chaw thov. Cov nyhuv feem ntau zoo nkauj tsis muaj zog, txawm li cas los xij.
Qhov sib nqus susceptibility ntawm graphite tuaj yeem sib txawv nyob ntawm ob peb yam. Ib qho ntawm cov ntsiab lus tseem ceeb yog cov qauv ntawm cov graphite. Graphite muaj txheej txheej txheej, nrog carbon atoms teem rau hauv hexagonal nplooj. Txoj kev cov khaubncaws sab nraud povtseg yog stacked thiab orientation ntawm nplooj ntawv, tuaj yeem cuam tshuam rau kev sib nqus susceptibility.
Lwm qhov tseem ceeb yog impurities. Txawm tias me me ntawm impurities hauv graphite tuaj yeem hloov nws cov khoom sib nqus. Piv txwv li, yog tias muaj cov kab mob ferromagnetic xws li hlau hauv graphite, nws tuaj yeem ua rau muaj kev cuam tshuam tag nrho cov hlau nplaum. Raws li PECVD graphite nkoj xa khoom, peb tau saib xyuas zoo los xyuas kom meej tias peb cov nkoj graphite muaj qhov sib xws thiab qis - qib magnetic susceptibility. Peb siv siab - purity graphite thiab advanced manufacturing txheej txheem kom txo tau cov impurities.
Vim li cas qhov sib nqus susceptibility ntawm PECVD graphite nkoj teeb meem? Zoo, nyob rau hauv cov txheej txheem PECVD, feem ntau muaj hluav taws xob thiab hlau nplaum koom nrog. Ib lub nkoj uas muaj qhov siab lossis tsis sib xws ntawm cov hlau nplaum sib nqus tuaj yeem cuam tshuam nrog cov txheej txheem tso tawm. Nws tuaj yeem ua rau tsis sib xws ntawm cov wafers, ua rau qis dua - cov khoom zoo. Los ntawm muaj qhov zoo - tswj kev sib nqus nqus, peb tuaj yeem ua kom peb cov nkoj graphite ua tau zoo hauv PECVD ib puag ncig.
Peb cov nkoj graphite kuj tseem siv nrog rau lwm cov khoom siv graphite hauv PECVD system. Cov Graphite Cheebtsam no txhua tus yuav tsum ua haujlwm ua ke seamlessly. Qhov sib nqus susceptibility ntawm txhua yam tuaj yeem cuam tshuam rau tag nrho cov kev ua haujlwm ntawm lub cev. Piv txwv li, yog tias lub nkoj graphite thiab cov graphite puag susceptors muaj qhov sib txawv ntawm cov hlau nplaum sib txawv, nws tuaj yeem ua rau tsis muaj kev cuam tshuam hauv cov hlau nplaum hauv PECVD chamber. Koj tuaj yeem kawm paub ntxiv txog Graphite Base Susceptors ntawm peb lub xaib.
Thaum nws los ntsuas qhov sib nqus nqus ntawm peb lub nkoj PECVD graphite, peb siv cov cuab yeej tshwj xeeb. Muaj ntau txoj hauv kev los ntsuas qhov sib nqus nqus, xws li Gouy balance method thiab SQUID (Superconducting Quantum Interference Device) magnetometry. Cov txheej txheem no tso cai rau peb kom raug txiav txim siab cov khoom sib nqus ntawm peb cov khoom.
Peb kuj tseem ua cov kev tswj xyuas tsis tu ncua kom paub tseeb tias qhov sib nqus susceptibility ntawm peb cov nkoj graphite nyob hauv qhov xav tau. Qhov no pab peb tswj tau qhov zoo ntawm peb cov khoom thiab ua tau raws li cov kev cai nruj ntawm peb cov neeg muas zaub nyob rau hauv lub semiconductor thiab photovoltaic industries.
Yog tias koj nyob hauv kev ua lag luam rau PECVD graphite nkoj lossis lwm yam khoom siv graphite rau koj qhov system PECVD, peb xav nrog koj tham. Txawm hais tias koj yog ib qho me me - scale tshawb fawb lab los yog loj - scale manufacturing chaw, peb muaj peev xwm muab koj nrog siab - zoo graphite daws. Peb lub nkoj graphite yog tsim los kom muaj qhov sib xws thiab tsis tshua muaj hlau nplaum, uas yog qhov tseem ceeb rau kev ua tiav PECVD.
Yog tias koj muaj lus nug txog kev sib nqus ntawm peb lub nkoj PECVD graphite lossis xav paub ntau ntxiv txog peb cov khoom, tsis txhob yig tiv tauj. Peb nyob ntawm no los pab koj nrhiav cov graphite zoo tshaj plaws rau koj cov kev xav tau. Hu rau peb hnub no los pib sib tham txog koj cov kev cai PECVD.
Cov ntaub ntawv
"Introduction to Solid State Physics" los ntawm Charles Kittel
"Magnetism thiab Magnetic Materials" los ntawm David Jiles