Hav nyob ntawd! Raws li tus neeg xa khoom ntawm PECVD graphite nkoj, kuv feem ntau tau nug txog qhov dielectric tas li ntawm cov nkoj graphite no. Yog li, kuv xav tias kuv yuav nkag siab - tob rau hauv cov ncauj lus no thiab qhia qee qhov kev nkag siab rau koj.
Ua ntej tshaj, cia peb nkag siab tias PECVD yog dab tsi. PECVD sawv cev rau Plasma - Txhim Kho Tshuaj Vapor Deposition. Nws yog txheej txheem siv nyob rau hauv semiconductor thiab photovoltaic industries tso nyiaj nyias zaj duab xis mus rau ib tug substrate. Thiab graphite nkoj ua si lub luag haujlwm tseem ceeb hauv cov txheej txheem no. Lawv yog siv los tuav lub substrates thaum lub sij hawm deposition, muab ib tug ruaj khov thiab conductive ib puag ncig.
Tam sim no, qhov dielectric tas li, tseem hu ua txheeb ze permittivity, yog qhov ntsuas ntawm qhov hluav taws xob cuam tshuam li cas thiab cuam tshuam los ntawm cov khoom siv dielectric. Lub dielectric yog ib qho khoom siv insulating uas tuaj yeem ua polarized los ntawm kev siv hluav taws xob. Thaum ib qho hluav taws xob siv rau dielectric, cov nqi hauv cov khoom hloov me ntsis, tsim kom muaj hluav taws xob sab hauv uas tawm tsam sab nraud.
Yog li, dab tsi txog qhov dielectric tas li ntawm PECVD graphite nkoj? Graphite yog ib daim ntawv ntawm cov pa roj carbon, thiab nws muaj qee yam hluav taws xob tshwj xeeb. Nws yog ib tug zoo conductor ntawm hluav taws xob, tab sis thaum nws los txog rau nws cov dielectric tus cwj pwm, tej yam tau txais me ntsis complex.
Lub dielectric tas li ntawm graphite tuaj yeem sib txawv nyob ntawm ntau yam. Ib qho ntawm cov ntsiab lus tseem ceeb yog kev taw qhia ntawm graphite txheej. Graphite muaj cov txheej txheem txheej, thiab cov khoom siv hluav taws xob tuaj yeem sib txawv thaum uas tig mus thiab ua rau cov txheej txheem. Feem ntau, qhov dielectric tas li ntawm graphite nyob rau hauv cov kev taw qhia thaum uas tig mus rau cov khaubncaws sab nraud povtseg yog txawv los ntawm qhov uas nyob rau hauv lub perpendicular kev taw qhia.
Lwm yam uas cuam tshuam rau qhov dielectric tas li yog purity ntawm graphite. Cov impurities hauv graphite tuaj yeem hloov nws cov khoom hluav taws xob thiab yog li nws qhov dielectric tas li. Raws li PECVD graphite nkoj xa khoom, peb saib xyuas zoo hauv kev ua kom lub siab huv ntawm peb cov nkoj graphite. High - purity graphite tsis tsuas yog muaj hluav taws xob zoo dua, tab sis kuj muaj cov khoom siv hluav taws xob zoo sib xws.
Qhov zaus ntawm daim ntawv thov hluav taws xob kuj ua lub luag haujlwm. Ntawm qhov tsawg zaus, qhov dielectric tas li ntawm graphite yuav txawv ntawm qhov nws nyob ntawm qhov siab. Qhov no yog vim hais tias cov polarization mechanisms nyob rau hauv lub graphite tuaj yeem hloov nrog qhov zaus ntawm qhov hluav taws xob.
Tam sim no, nws yog ib qho tseem ceeb uas yuav tsum nco ntsoov tias tsis muaj ib qho, tas li tus nqi rau qhov dielectric tas li ntawm PECVD graphite nkoj. Cov tuam txhab sib txawv tuaj yeem tsim cov nkoj graphite nrog cov dielectric sib txawv me ntsis vim muaj kev hloov pauv hauv cov txheej txheem tsim khoom, cov khoom siv raw siv, thiab kev kho cov graphite.
Hauv cov txheej txheem PECVD, qhov dielectric tas li ntawm lub nkoj graphite tuaj yeem cuam tshuam rau cov txheej txheem tso nyiaj. Piv txwv li, nws tuaj yeem cuam tshuam rau kev faib hluav taws xob hauv lub chamber. Ib qho tsis zoo - tsis tu ncua dielectric tuaj yeem ua rau qhov tsis sib xws ntawm cov yeeb yaj kiab nyias ntawm lub substrate, uas yog qhov peb xav kom zam.
Raws li ib tug neeg muab khoom, peb ua hauj lwm nyuaj los tswj thiab optimize lub dielectric zog ntawm peb graphite nkoj. Peb siv cov txheej txheem kev tsim khoom siab heev thiab kev tswj xyuas zoo los xyuas kom meej tias txhua lub nkoj graphite peb tsim muaj cov khoom zoo sib xws thiab tsim nyog rau cov txheej txheem PECVD.
Thaum nws los txog rau peb cov khoom lag luam, peb kuj muab lwm cov graphite - raws li cov khoom lag luam. Piv txwv li, peb muaj Graphite Bipolar Phaj. Cov phaj bipolar no tau siv dav hauv cov roj hlwb thiab lwm lub zog - ntsig txog kev siv. Lawv yog tsim los ntawm siab - zoo graphite, uas muab zoo hluav taws xob conductivity thiab corrosion kuj.
Peb kuj muab Graphite Cheebtsam. Cov khoom no yog tsim los ua kom tau raws li cov kev xav tau tshwj xeeb ntawm kev lag luam sib txawv. Txawm hais tias nws yog rau kev tsim khoom semiconductor lossis lwm yam siab - tech daim ntawv thov, peb cov khoom siv graphite paub txog lawv qhov tseeb thiab kev ntseeg tau.
Thiab tom qab ntawd muaj Graphite Base Susceptors. Cov susceptors no yog siv nyob rau hauv cov txheej txheem uas cua sov thiab thermal tswj yog ib qho tseem ceeb. Lawv tuaj yeem hloov cov cua sov kom zoo thiab muab lub platform ruaj khov rau cov substrates.
Yog tias koj nyob hauv kev ua lag luam rau PECVD graphite nkoj lossis ib qho ntawm peb cov khoom siv graphite, peb xav hnov los ntawm koj. Peb pab pawg kws tshaj lij yeej ib txwm npaj los teb koj cov lus nug, muab kev txhawb nqa, thiab pab koj nrhiav cov khoom tsim nyog rau koj cov kev xav tau tshwj xeeb. Txawm hais tias koj yog ib tug me me - scale tshawb fawb lab los yog loj - scale manufacturing cog, peb muaj cov kev daws rau koj.
Tiv tauj peb hnub no los pib kev sib tham txog koj cov kev xav tau. Peb cia siab tias peb cov khoom zoo siab - graphite zoo thiab cov neeg siv khoom zoo yuav ua tau raws li qhov koj xav tau. Cia peb ua haujlwm ua ke kom ua tiav koj lub hom phiaj hauv semiconductor, photovoltaic, lossis lwm yam kev lag luam uas cov khoom siv graphite yog qhov tseem ceeb.
Cov ntaub ntawv:
Cov ntsiab lus ntawm Semiconductor Devices los ntawm SM Sze
Phau ntawv ntawm Graphite thiab Carbon Technology los ntawm RE Tressler