Graphite base susceptors yog cov khoom tseem ceeb hauv ntau yam kev lag luam, tshwj xeeb tshaj yog nyob rau hauv semiconductor manufacturing, photovoltaic (PV) ntau lawm, thiab lwm yam siab - tech applications. Ib qho ntawm cov khoom zoo tshaj plaws ntawm graphite-raws li susceptors yog lawv lub peev xwm los tiv thaiv corrosion. Hauv qhov blog no, ua tus xa khoom ntawm graphite base susceptors, kuv yuav delve rau hauv cov txheej txheem tom qab lawv cov kev tiv thaiv corrosion thiab sib tham txog yuav ua li cas cov susceptors tswj lawv txoj kev ncaj ncees nyob rau hauv ib puag ncig hnyav.
1. Kev sib xyaw thiab cov qauv ntawm Graphite Base Susceptors
Graphite yog ib daim ntawv ntawm carbon, qhov twg carbon atoms yog teem nyob rau hauv ib tug hexagonal lattice qauv. Hauv graphite puag susceptors, cov qauv tshwj xeeb no ua lub luag haujlwm tseem ceeb hauv kev tiv thaiv corrosion. Cov pa roj carbon - carbon bonds hauv graphite muaj zog heev, nrog rau qib siab ntawm covalent cim. Cov ntawv cog lus muaj zog no ua rau nws nyuaj rau cov neeg ua haujlwm corrosive kom tawg lawv thiab tawm tsam cov khoom.
Cov txheej txheej txheej ntawm graphite kuj ua rau nws cov corrosion - resistant zog. Cov khaubncaws sab nraud povtseg tau tuav ua ke los ntawm cov tsis muaj zog van der Waals. Qhov no tso cai rau cov graphite kom muaj qee qhov hloov tau yooj yim, uas tuaj yeem pab nws tiv taus kev ntxhov siab thaum lub sijhawm ua haujlwm corrosion. Thaum tus neeg sawv cev corrosive sim nkag mus rau graphite, cov khaubncaws sab nraud povtseg tuaj yeem ua qhov thaiv, tiv thaiv tus neeg sawv cev los ntawm kev nkag mus tob rau hauv cov khoom.
2. Tshuaj Inertness ntawm Graphite
Graphite yog tshuaj inert nyob rau hauv ntau yam mob. Nws muaj qhov tsis tshua muaj tshwm sim nrog cov tshuaj lom neeg feem ntau, nrog rau cov kua qaub, cov hauv paus, thiab ntau cov kuab tshuaj organic. Qhov inertness no yog vim qhov ruaj khov hluav taws xob teeb tsa ntawm carbon atoms hauv graphite. Cov pa roj carbon atoms nyob rau hauv hexagonal rings muaj tag nrho cov valence electrons, ua rau lawv tsis tshua muaj kev koom tes nyob rau hauv cov tshuaj tiv thaiv.
Piv txwv li, nyob rau hauv ib puag ncig acidic, graphite puag susceptors tuaj yeem tiv thaiv cov teebmeem ntawm cov kua qaub uas muaj zog xws li sulfuric acid thiab hydrochloric acid. Cov pa roj carbon muaj zog - carbon bonds tiv thaiv cov kua qaub molecules los ntawm reacting nrog cov qauv graphite. Ib yam li ntawd, hauv cov kev daws teeb meem, graphite tsis nkag siab nrog hydroxide ions, tswj nws cov qauv kev ntseeg siab.
3. Nto Khoom ntawm Graphite Base Susceptors
Qhov saum npoo ntawm graphite puag susceptors tuaj yeem tsim kho los txhim kho lawv cov kev tiv thaiv corrosion. Ib tug du nto tiav yuav txo tau qhov chaw muaj rau corrosive cov neeg ua raws li. Thaum lub sij hawm tsim cov txheej txheem, cov susceptors tuaj yeem polished mus rau qib siab, txo qis qhov tsis sib xws uas cov tshuaj corrosive tuaj yeem sib sau.
Tsis tas li ntawd, kev kho saum npoo tuaj yeem siv los txhim kho corrosion kuj. Piv txwv li, ib txheej nyias ntawm cov txheej tiv thaiv tuaj yeem tso rau ntawm graphite nto. Cov txheej no tuaj yeem ua raws li lub cev tiv thaiv ntawm graphite thiab ib puag ncig corrosive. Qee cov ntaub ntawv txheej txheej muaj xws li silicon carbide (SiC), uas muaj tshuaj lom neeg ruaj khov thiab tawv. SiC txheej tuaj yeem tiv thaiv kev nkag mus ntawm cov kab mob corrosive thiab tseem muab kev tiv thaiv kev tiv thaiv ntxiv rau graphite puag susceptor.
4. Kev tiv thaiv Oxidation
Oxidation yog ib hom kev xeb, tshwj xeeb tshaj yog thaum kub kub. Graphite puag susceptors muaj qee qhov kev tiv thaiv oxidation. Ntawm qhov kub thiab txias (hauv qab 400 - 500 degree), oxidation tus nqi ntawm graphite qeeb heev. Qhov no yog vim hais tias cov pa oxygen molecules yuav tsum tau ua txhaum cov pa roj carbon muaj zog - carbon daim ntawv cog lus kom hnov mob nrog cov graphite.
Txawm li cas los xij, ntawm qhov kub siab dua, oxidation tuaj yeem dhau los ua qhov teeb meem tseem ceeb. Txhawm rau hais txog qhov no, qee cov graphite puag susceptors yog tsim los nrog oxidation - resistant additives lossis coatings. Piv txwv li, boron compounds tuaj yeem muab ntxiv rau graphite matrix. Boron tsim cov txheej txheem tiv thaiv oxide rau ntawm qhov chaw ntawm graphite thaum raug oxygen ntawm qhov kub thiab txias. Cov txheej txheem oxide no ua haujlwm raws li kev thaiv, txo tus nqi ntawm oxidation ntxiv.
5. Daim ntawv thov thiab Corrosion Resistance hauv kev lag luam tshwj xeeb
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Semiconductor Manufacturing
Hauv kev tsim khoom semiconductor, graphite base susceptors yog siv rau hauv cov txheej txheem xws li tshuaj vapor deposition (CVD) thiab lub cev vapor deposition (PVD). Cov txheej txheem no feem ntau koom nrog kev siv cov pa roj reactive thiab siab - ib puag ncig kub. Kev tiv thaiv corrosion ntawm graphite puag susceptors yog qhov tseem ceeb los xyuas kom meej qhov ruaj khov thiab zoo ntawm cov khoom siv semiconductor. Piv txwv li, hauv CVD cov txheej txheem, corrosive gases xws li hydrogen chloride thiab ammonia yog siv. Cov graphite puag susceptors tuaj yeem tiv taus cov tshuaj tua kab mob ntawm cov pa roj, tswj lawv cov duab thiab cov khoom nto, uas yog qhov tseem ceeb rau kev tso tawm ntawm cov yeeb yaj kiab nyias ntawm semiconductor wafers.
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Kev lag luam photovoltaic
Hauv kev lag luam photovoltaic, graphite base susceptors yog siv hauv cov txheej txheem xws li PECVD Graphite Boat daim ntawv thov. PECVD yog cov txheej txheem tseem ceeb rau kev tso cov yeeb yaj kiab nyias ntawm silicon wafers los ua lub hnub ci hlwb. Cov substrates yuav tsum tau tiv thaiv cov teebmeem corrosive ntawm cov roj siv hauv cov txheej txheem PECVD, xws li silane thiab ammonia. Lub corrosion-cov khoom tiv taus ntawm graphite ua kom lub sijhawm ntev - kev ua haujlwm ntawm PECVD cov cuab yeej thiab qhov zoo ntawm lub hnub ci hlwb tsim.
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Lwm yam High - Tech Applications
Graphite base susceptors kuj tau siv rau hauv lwm yam siab - tech applications, xws li hauv kev tsim cov Graphite Cheebtsam thiab Graphite Bipolar Phaj. Hauv cov ntawv thov no, cov susceptors raug rau ntau yam tshuaj thiab lub cev. Lawv corrosion kuj tso cai rau lawv ua hauj lwm zoo nyob rau hauv cov kev xav tau ib puag ncig, ua kom ntseeg tau thiab efficiency ntawm tag nrho cov txheej txheem ntau lawm.
6. Kev Kho thiab Ntev - Lub Sijhawm Corrosion Resistance
Txhawm rau kom muaj kev tiv thaiv corrosion ntawm graphite puag susceptors nyob rau lub sijhawm ntev, kev saib xyuas kom zoo yog qhov tseem ceeb. Kev tu tsis tu ncua tuaj yeem tshem tawm cov khoom corrosive uas nyob rau saum npoo ntawm cov susceptors. Txawm li cas los xij, yuav tsum tau saib xyuas thaum tu kom tsis txhob ua rau lub ntsej muag puas. Cov txhuam hniav mos thiab tsis yog - cov tshuaj ntxuav tu feem ntau pom zoo.
Tsis tas li ntawd, kev tshuaj xyuas ib ntus tuaj yeem pab txheeb xyuas cov cim qhia ntawm corrosion thaum ntxov. Yog tias kuaj pom muaj corrosion, cov kev ntsuas tsim nyog tuaj yeem ua tau, xws li rov-txhim kho lub susceptor lossis hloov cov khoom puas. Los ntawm kev ua raws li cov txheej txheem kev saib xyuas no, kev pabcuam lub neej ntawm graphite base susceptors tuaj yeem txuas ntxiv, thiab lawv cov khoom tiv thaiv corrosion - tuaj yeem khaws cia.
Xaus
Graphite puag susceptors muaj corrosion zoo heev - resistant zog vim lawv cov muaj pes tsawg leeg, qauv, tshuaj inertness, thiab nto khoom. Cov khoom no ua rau lawv haum rau ntau hom kev lag luam, tshwj xeeb tshaj yog nyob rau hauv siab - tech teb qhov twg corrosion tuaj yeem cuam tshuam rau qhov zoo thiab kev ua haujlwm ntawm cov txheej txheem ntau lawm.
Raws li ib tug neeg muab khoom ntawm graphite puag susceptors, peb tau cog lus los muab siab - cov khoom zoo nrog superior corrosion kuj. Peb cov khoom tau tsim thiab tsim siv cov thev naus laus zis tshiab thiab cov khoom siv los xyuas kom pom kev ua haujlwm zoo hauv qhov chaw hnyav. Yog tias koj xav tau graphite puag susceptors lossis muaj lus nug txog lawv cov kev tiv thaiv corrosion thiab kev siv, thov koj xav tiv tauj peb rau kev yuav khoom thiab kev sib tham ntxiv.
Cov ntaub ntawv
Fitzer, E., & Heidenreich, H. (1995). Carbon Fibers thiab lawv cov Composites. Springer - Verlag.
Marsh, H., & Rodríguez-Reinoso, F. (2006). Cov pa roj carbon activated. Elsevier.
Opeka, MM, Talmy, IG, & Zaykoski, JA (1999). Oxidation tiv thaiv graphite nrog multilayered SiC - raws li txheej. Phau ntawv Journal ntawm European Ceramic Society, 19(4), 487 - 493.